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- Inhaltsverzeichnis
- LESEZEICHEN
- Maintenance Instructions 1
- Table of Contents 4
- Table of Contents (continued) 5
- Benefits 8
- Compressor Configurations 8
- System Documentation 9
- Figure 1-1: 9600 Compressor 10
- Specifications 11
- P/N 8040540 1-5 12
- 9600 Compressor Description 13
- 1-6 P/N 8040540 13
- P/N 8040540 1-7 14
- Component Description 15
- P/N 8040540 1-9 16
- 1-10 P/N 8040540 17
- P/N 8040540 1-11 18
- 1-12 P/N 8040540 19
- P/N 8040540 1-13 20
- 1-14 P/N 8040540 21
- Introduction 22
- Shipping Carton Inspection 22
- Removal from Shipping Carton 22
- Compressor Inspection 23
- Section 3 - Installation 24
- P/N 8040540 3-3 26
- Electrical Connections 27
- P/N 8040540 3-5 28
- Installation 29
- 3-6 P/N 8040540 29
- P/N 8040540 3-7 30
- Disconnecting 31
- P/N 8040540 3-9 32
- 3-10 P/N 8040540 33
- P/N 8040540 3-11 34
- 3-12 P/N 8040540 35
- P/N 8040540 3-13 36
- 3-14 P/N 8040540 37
- P/N 8040540 3-15 38
- 3-16 P/N 8040540 39
- Section 4 - Operation 40
- Compressor Operation 41
- P/N 8040540 4-3 42
- Operation 43
- 4-4 P/N 8040540 43
- Section 5 - Maintenance 44
- P/N 8040540 5-3 46
- Maintenance 47
- 5-4 P/N 8040540 47
- P/N 8040540 5-5 48
- 5-6 P/N 8040540 49
- Prelimary 50
- Appendix B - Flow Diagram 52
- B-2 P/N 8040540 53
- Technical Inquiries 54
- C-2 P/N 8040540 55
- P/N 8040540 C-3 56
- C-4 P/N 8040540 57
- Appendix D - Schematic 58
Inhaltsverzeichnis
CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICSHELIX TECHNOLOGY CORPORATIONhttp://www.helixtechnology.com 9600 Compressor Installation, Operation, and M
9600 Compressor Installation, Operation, and MaintenanceP/N 8040540 1-3CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICSFigure 1-1: 9600 Compressor9600COM
9600 Compressor Description 1-4 P/N 8040540CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICSSpecificationsDimensionsThe dimensions of the Compressor are
9600 Compressor Installation, Operation, and MaintenanceP/N 8040540 1-5CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICSWeightThe weight of the Compressor
9600 Compressor Description 1-6 P/N 8040540CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICSCooling WaterThe water used to cool the Compressor must meet
9600 Compressor Installation, Operation, and MaintenanceP/N 8040540 1-7CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICSGeneralThe information in Table 1-
9600 Compressor Description 1-8 P/N 8040540CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICSComponent DescriptionThe components of the 9600 Compressor th
9600 Compressor Installation, Operation, and MaintenanceP/N 8040540 1-9CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICSSystem Circuit BreakerThe System C
9600 Compressor Description 1-10 P/N 8040540CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICSReturn Gas CouplingThe Return Gas Coupling returns the heliu
9600 Compressor Installation, Operation, and MaintenanceP/N 8040540 1-11CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICSCryopump Power Phase SwitchNOTE:
9600 Compressor Description 1-12 P/N 8040540CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICSFigure 1-5: 9600 Compressor Connected to Multiple On-Board C
ELIXH©2004 Helix Technology Corporation Printed in USAThe information in this document is believed to be accurate and reliable. However, Helix Technol
9600 Compressor Installation, Operation, and MaintenanceP/N 8040540 1-13CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICSMultiple Cryo-Torr Cryopump Conne
9600 Compressor Description 1-14 P/N 8040540CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICS
9600 Compressor Installation, Operation, and MaintenanceP/N 8040540 2-1CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICSSection 2 - Unpacking and Inspecti
Unpacking and Inspection2-2 P/N 8040540CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICSFigure 2-1: Using the Shipping Carton RampCompressor InspectionIn
9600 Compressor Installation, Operation, and MaintenanceP/N 8040540 3-1CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICSSection 3 - InstallationIntroducti
Installation 3-2 P/N 8040540CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICSFigure 3-1: 9600 Compressor Installation FlowchartSupply and Return Water Li
9600 Compressor Installation, Operation, and MaintenanceP/N 8040540 3-3CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICSSupply and Return Water Line Conne
Installation 3-4 P/N 8040540CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICSElectrical ConnectionsThe following procedures provide information for makin
9600 Compressor Installation, Operation, and MaintenanceP/N 8040540 3-5CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICSFigure 3-2: 9600 Compressor Circui
Installation 3-6 P/N 8040540CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICSPhase CheckWARNINGFollow all high voltage safety precautions when performing
9600 Compressor Installation, Operation, and MaintenanceP/N 8040540 3-7CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICSCryopump Power Phase Switch Settin
Installation 3-8 P/N 8040540CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICSDisconnecting1. Using two wrenches as shown in Figure 3-3, disconnect the tw
9600 Compressor Installation, Operation, and MaintenanceP/N 8040540 3-9CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICSSingle On-Board Cryopump Connectio
Installation 3-10 P/N 8040540CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICSSingle Cryo-Torr Cryopump ConnectionsCAUTIONMake sure the Compressor power
9600 Compressor Installation, Operation, and MaintenanceP/N 8040540 3-11CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICSMultiple On-Board Cryopump Connec
Installation 3-12 P/N 8040540CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICSPower Cable Connections1. Connect the On-Board Splitter Box power cable bet
9600 Compressor Installation, Operation, and MaintenanceP/N 8040540 3-13CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICSFigure 3-7: Alternative Multiple
Installation 3-14 P/N 8040540CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICS1. Connect the Supply and Return lines to the 9600 Compressor as described
9600 Compressor Installation, Operation, and MaintenanceP/N 8040540 3-15CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICSNOTE: The Cryo-Torr Interface can
Installation 3-16 P/N 8040540CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICSFigure 3-9: Alternative Multiple Cryo-Torr Cryopump InstallationCRYOPUMP PO
9600 Compressor Installation, Operation, and MaintenanceP/N 8040540 4Table of ContentsSection 1 - 9600 Compressor DescriptionGeneral . . . . . . . . .
9600 Compressor Installation, Operation, and MaintenanceP/N 8040540 4-1CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICSSection 4 - OperationAdjusting Sys
Operation4-2 P/N 8040540CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICSNOTE: The use of a higher helium charge pressure for 50 HZ operation is necessar
9600 Compressor Installation, Operation, and MaintenanceP/N 8040540 4-3CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICSIf you have concerns about system
Operation4-4 P/N 8040540CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICS
9600 Compressor Installation, Operation, and MaintenanceP/N 8040540 5-1CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICSSection 5 - MaintenanceScheduled M
Maintenance5-2 P/N 8040540CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICSAdsorber ReplacementUse the following procedure to change the adsorber every t
9600 Compressor Installation, Operation, and MaintenanceP/N 8040540 5-3CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICS9. Ensure that the pressure gauge
Maintenance5-4 P/N 8040540CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICSAdjusting System Helium PressureNOTE: These procedures can be performed on a c
9600 Compressor Installation, Operation, and MaintenanceP/N 8040540 5-5CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICS• To the value previously recorded
Maintenance5-6 P/N 8040540CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICS2. Purge the regulator and charging lines as follows:a. Open the regulator a s
9600 Compressor Installation, Operation, and Maintenance5 P/N 8040540Table of Contents (continued)Section 3 - InstallationIntroduction . . . . . . .
Document TitleELIXH©2004 Helix Technology Corporation Pub. No. 8040509, Rev. 101, 01/26/04 ECO No. 16210 A-1PrelimaryAppendix A - Customer Support Inf
9600 Compressor Installation, Operation, and MaintenanceP/N 8040540 B-1CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICSAppendix B - Flow DiagramFigure B-
Appendix B - Flow DiagramB-2 P/N 8040540
9600 Compressor Installation, Operation, and MaintenanceP/N 8040540 C-1CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICSAppendix C - Troubleshooting Proce
Appendix C - Troubleshooting ProceduresC-2 P/N 8040540CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICSTable C-1: Compressor Troubleshooting ProceduresPr
9600 Compressor Installation, Operation, and MaintenanceP/N 8040540 C-3CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICS3) System circuit breaker (CB1) w
Appendix C - Troubleshooting ProceduresC-4 P/N 8040540CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICS
9600 Compressor Installation, Operation, and MaintenanceP/N 8040540 D-1CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICSAppendix D - Schematic
Figure D-1:9600 Motor Drive Compressor Schematic
9600 Compressor Installation, Operation, and MaintenanceP/N 8040540 6Table of Contents (continued)Appendix A - Customer Support InformationAppendix B
9600 Compressor Installation, Operation, and Maintenance7 P/N 8040540Table of Contents (continued)Figure 5-1: Disconnecting Self Sealing Couplings .
9600 Compressor Installation, Operation, and MaintenanceP/N 8040540 1-1CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICSSection 1 - 9600 Compressor Descri
9600 Compressor Description 1-2 P/N 8040540CHELIX TECHNOLOGY CORPORATION-TI CRYOGENICSSystem DocumentationThe manuals for a system cover two basic
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